Upgrades

Platforms & Technologies Supported

• Aixtron® MOCVD Systems – Legacy and current production platforms

• Veeco® MOCVD Systems – Process optimization, upgrades, and modernization

• High-Purity Gas Delivery Systems – VMBs, gas cabinets, gas panels, and distribution networks

• Life Safety & Hazard Management – Cause & Effect matrix development, combustible and toxic gas monitoring, emergency shutdown (ESD) systems, and facility interlocks

• Process Hardware Integration – Additional mass flow controllers (MFCs), pneumatic valves, pressure controllers, sensors, and custom process hardware

• Toxic Gas Abatement Systems – Wet and dry scrubbers, exhaust management, and regulatory compliance

• Semiconductor Materials Expertise

  • Gallium Arsenide (GaAs)

  • Indium Phosphide (InP)

  • Gallium Nitride (GaN)

  • Silicon Carbide (SiC)

• Legacy Equipment Modernization – Extend tool life while integrating modern controls and automation

• Factory Acceptance Testing (FAT) & Site Acceptance Testing (SAT)

• Process Qualification & Production Ramp-Up

• Equipment Installation, Relocation & Commissioning

• Preventive Maintenance & Reliability Improvements

Don’t see your platform listed? Contact III-V Solutions to discuss your specific MOCVD system and upgrade requirements.